Discharge lamp sources apparatus and methods
Номер патента: EP1051727A1
Опубликовано: 15-11-2000
Автор(ы): Gregory M. Shimkaveg, Marc A. Klosner, William T. Silfvast
Принадлежит: UNIVERSITY OF CENTRAL FLORIDA
Опубликовано: 15-11-2000
Автор(ы): Gregory M. Shimkaveg, Marc A. Klosner, William T. Silfvast
Принадлежит: UNIVERSITY OF CENTRAL FLORIDA
Реферат: A capillary discharge extreme ultraviolet lamp source apparatus and method for extreme ultraviolet microlithography. The capillary source includes a lamp body (306); a bore having electrodes (300), insulators (302) and a discharge plasma region (304).
High-voltage discharge lamp, lamp unit, projection image display device, and method for manufacturing high-voltage discharge lamp
Номер патента: US09449806B2. Автор: Yutaka Nishida,Katsuhiro Ono,Jun Sakaguchi,Yoshiki Kitahara,Mitsuko Shuto. Владелец: Panasonic Intellectual Property Management Co Ltd. Дата публикации: 2016-09-20.