Methods of manufacturing a workpiece fixture for supporting a workpiece in a precision manufacturing process; method of generating a support blade machining pattern; and target material fixture
Номер патента: EP3829810A1
Опубликовано: 09-06-2021
Автор(ы): Jake GILLESPIE, James Graham Hall, James Stewart HALL, Michael Gallagher, Scott MCVEY
Принадлежит: Tannlin Technology Ltd
Опубликовано: 09-06-2021
Автор(ы): Jake GILLESPIE, James Graham Hall, James Stewart HALL, Michael Gallagher, Scott MCVEY
Принадлежит: Tannlin Technology Ltd
Реферат: Disclosed are methods of manufacturing a workpiece fixture (10) and also a target material fixture (10), for use in precision manufacturing processes. A sheet material is supported on a generic material fixture (10) and the sheet material precision processed to form support blades (16, 18) for a target workpiece fixture (10). Each support blade (16, 18) has a support locus and interstices are positioned in the support loci where a target pattern and the support loci coincide. Thus, there are no unnecessary clearances between the workpiece support (10) and the workpiece. The interstices that are present are located only where necessary to reduce or eliminate any interference between the precision manufacturing process and the fixture (10), when it is used in a precision process involving the target pattern.
Manufacturing method of single crystal silicon substrate
Номер патента: US20230381894A1. Автор: Hayato Iga. Владелец: Disco Corp. Дата публикации: 2023-11-30.