Liquid ejection device, nanoimprinting apparatus, nanoimprinting liquid storage tank, method of manufacturing cured product pattern, method of manufacturing optical component, method of manufacturing circuit board, and method of manufacturing imprinting mold
Номер патента: WO2016067525A1
Опубликовано: 06-05-2016
Автор(ы): Kazumi Sakamoto, Toshiki Ito, Yoshimasa Araki
Принадлежит: CANON KABUSHIKI KAISHA
Получить PDF файл: Открыть в новом окне
Опубликовано: 06-05-2016
Автор(ы): Kazumi Sakamoto, Toshiki Ito, Yoshimasa Araki
Принадлежит: CANON KABUSHIKI KAISHA
Получить PDF файл: Открыть в новом окне
Liquid ejection device, nanoimprinting apparatus, nanoimprinting liquid storage tank, method of manufacturing cured product pattern, method of manufacturing optical component, method of manufacturing circuit board, and method of manufacturing imprinting mold
Номер патента: US20170326583A1. Автор: Toshiki Ito,Yoshimasa Araki,Kazumi Iwashita. Владелец: Canon Inc. Дата публикации: 2017-11-16.