Apparatus and method for reducing contamination in immersion lithography .

Apparatus and method for reducing contamination in immersion lithography

Номер патента: US20070188731A1
Опубликовано: 16-08-2007
Автор(ы): Dario Goldfarb, Dmitriy Shneyder, Kafai Lai, Raschid Bezama, Xiao Liu
Принадлежит: International Business Machines Corp
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

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Flexible dot matrix bonding apparatus and adaptive clamping method for disk-type planar component

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Hydrogen supply apparatus and hydrogen supply method for measuring fuel consumption of hydrogen fuel vehicle

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Method for creating barriers to metal contamination in silicon oxides

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Apparatus, and an associated method, for performing link layer paging of a mobile station operable in a radio communication system

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Inkjet assembly, inkjet printing apparatus and inkjet printing method for use in preparation of display component

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Cylinder valves and methods for inhibiting the formation of contaminants in cylinders and cylinder valves

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Power feeding apparatus and power feeding method for submerged pump

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Apparatuses and wireless communication methods for data transfer

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Apparatus and the associated methods for calibrating a wavefront sensor

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Power feeding apparatus and power feeding method for submersible pump

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Apparatus, and an associated method, for facilitating synchronization in a wireless mesh network

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Methods for suppressing deposition of organic contaminants in systems for production of cellulose and paper

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Method for the biodegradation of organic contaminants in a mass of particulate solids and apparatus therefor

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Appratus and method for filtrating oil-containing drainage water, and method and apparatus for restoring filtration membrane device

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Appratus and method for filtrating oil-containing drainage water, and method and apparatus for restoring filtration membrane device

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Electrical apparatus and methods for an eye

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Quenching apparatus and quenching method for metal sheet, and method for manufacturing steel sheet

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Apparatus and method for processing foodstuffs with liquid

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Apparatus and method for marking objects on different faces

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Apparatus and method for processing foodstuffs with liquid

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Apparatus and method for processing foodstuffs with liquid

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Knob element and slide element of an adjusting apparatus and adjusting apparatus and method for adjusting a position of a thermal tripping shaft

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Vaporization apparatus and method for controlling the same

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Vaporization apparatus and method for controlling the same

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Apparatus and method for processing electronic components

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Fiber laser apparatus, image display apparatus and method of exciting up-conversion fiber laser apparatus

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Control apparatus and control method for ac rotary machine, and electric power steering apparatus

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Control apparatus and control method for AC rotary machine, and electric power steering apparatus

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Control apparatus and control method for variable valve mechanism

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Material vehicle, traction apparatus and system, and method for controlling bidirectional traveling of material vehicle

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Material vehicle, traction apparatus and system, and method for controlling bidirectional traveling of material vehicle

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Arrangement in a wave energy recovery apparatus and method for operating a wave energy recovery apparatus

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X-ray reference object, x-ray detector, additive manufacturing apparatus and method for calibrating the same

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Systems and methods to reduce reductant consumption in exhaust aftertreament systems

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Apparatus, system and method for identifying subintimal path of a flexible elongated device

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Apparatus, system and method for identifying subintimal path of a flexible elongated device

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Apparatus and method for transmitting and receiving signal in multimedia system

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Apparatus and method for transmitting and receiving signal in multimedia system

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Rail having an identification marker, and apparatus and method for identifying the rail

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Apparatus, system and method for identifying subintimal path of a flexible elongated device

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An apparatus and method for electroplating a substrate in a continuous way

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System and method for filling a battery cell with liquid electrolyte

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System and method for filling a battery cell with liquid electrolyte

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System and method for filling a battery cell with liquid electrolyte

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Apparatus and method for weeding a multilayer sheet comprising a support liner and at least one adhesive film coupled with the liner

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Digital video recording apparatus and editing method for recorded broadcast programs

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Apparatus and method for forming and quickly wrapping a bale in a bale forming chamber

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Meta data information providing server, client apparatus, method of providing meta data information, and method of providing content

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Stent graft apparatus and method

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System and method for controlling blade pitch of wind turbine rotor blades to reduce vibrations and limit loads in a locked condition of the rotor hub

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Apparatus and method for selectably operating radio device in alternate operating mode

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Apparatus and method for providing operative power to powerline-network device

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Wireless power apparatus for substrates treating apparatus and manufacturing method of wireless power apparatus for substrate treating apparatus

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Apparatus and method for selectably operating radio device in alternate operating mode

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Apparatus and method for securing data in computer storage

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Apparatus and method for directing a communication session to a communication device of a group of devices having a common registration identity

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Apparatus and method for measurement of biological structures

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Apparatus and method for measurement of biological structures

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Apparatus and method for measurement of biological structures

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Apparatus and method for measurement of biological structures

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Apparatus and method for measurement of biological structures

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Device and method for separating value documents, and value document processing system

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Systems and methods for tandem free operation signal transmission

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Recording apparatus and color measuring method for recording apparatus

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Stacking apparatus and stacking method

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Frit coating method, a frit coating apparatus, a sealing apparatus, and a sealing method for a flat-type cathode-ray tube

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Drawing apparatus and drawing method for drawing apparatus

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Mobile terminal test apparatus and parameter replacement method for use in mobile terminal test apparatus

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Apparatus and method for reducing the waste of welding gas

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Testing apparatus and testing method for telephone apparatus

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Protection apparatus and protection method for photovoltaic power generation system and photovoltaic power generation system

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Terminal, heating apparatus and charging method for battery

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Supply apparatus and supply method for supplying fluid carbon dioxide

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Communication apparatus and communication method for enhanced sensing by proxy

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Communication apparatus and communication method for enhanced sensing by proxy

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Signal processing apparatus and parameter setting method for the apparatus

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Liquid discharge apparatus and discharge control method for liquid discharge apparatus

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Communication apparatus and communication method for multi-generation random access

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