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METAL-INSULATOR-METAL (MIM) CAPACITOR STRUCTURE AND METHOD FOR FORMING THE SAME

Номер патента: US20190131385A1
Опубликовано: 02-05-2019
Автор(ы): CHEN Dian-Hau, CHEN Hui-Chi, Chen Yen-Ming, Hsiao Tsung-Chieh, Hsiao Yuan-Yang, Huang Chih-Fan, PAI Chih-Yang
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Multiple layer metal-insulator-metal (mim) structure

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Process to Improve Performance for Metal-Insulator-Metal (MIM) Capacitors

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Vertical metal-insulator-metal (MIM) capacitor and method of fabricating the same

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Self-aligned bottom plate for metal high-k dielectric metal insulator metal (mim) embedded dynamic random access memory

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Metal-Insulator-Metal (MIM) Capacitor Within Topmost Thick Inter-Metal Dielectric Layers

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Interconnect structures and design structures for a radiofrequency integrated circuit

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Decoupling MIM capacitor designs for interposers and methods of manufacture thereof

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Номер патента: US11450733B2. Автор: Yen-Chieh Huang,Chia-Ta Yu,Sai-Hooi Yeong. Владелец: Taiwan Semiconductor Manufacturing Co TSMC Ltd. Дата публикации: 2022-09-20.

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Electromagnetic shielding metal-insulator-metal capacitor structure

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Номер патента: US20200119136A1. Автор: Oscar van der Straten,Alexander Reznicek,Joshua Rubin,Praneet Adusumilli. Владелец: International Business Machines Corp. Дата публикации: 2020-04-16.

Electromagnetic shielding metal-insulator-metal capacitor structure

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Номер патента: US20200258846A1. Автор: Fong-Yuan Chang,Chin-Chou Liu,Po-Hsiang Huang,Yi-Kan Cheng,Cheng-Hung Yeh,Hui Yu Lee,Ka Fai CHANG. Владелец: Taiwan Semiconductor Manufacturing Co TSMC Ltd. Дата публикации: 2020-08-13.

SOC with integrated voltage regulator using preformed MIM capacitor wafer

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Decoupling MIM Capacitor Designs for Interposers and Methods of Manufacture Thereof

Номер патента: US20140235019A1. Автор: Chen-Jong Wang,Kuo-Chi Tu,Kuo-Chyuan Tzeng,Hsiang-Fan Lee. Владелец: Taiwan Semiconductor Manufacturing Co TSMC Ltd. Дата публикации: 2014-08-21.

Soc with integrated voltage regulator using preformed mim capacitor wafer

Номер патента: US20170256489A1. Автор: Jun Zhai,Kunzhong Hu. Владелец: Apple Inc. Дата публикации: 2017-09-07.

Soc with integrated voltage regulator using preformed mim capacitor wafer

Номер патента: US20170018497A1. Автор: Jun Zhai,Kunzhong Hu. Владелец: Apple Inc. Дата публикации: 2017-01-19.

Semiconductor Structures And Methods Of Forming The Same

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Method for manufacturing a trench metal insulator metal capacitor

Номер патента: US09741817B2. Автор: Yakov Roizin,Amos Fenigstein,Michael Lisiansky,Hironori Matsuyoshi,Toshiaki Ohmi. Владелец: Tower Semiconductor Ltd. Дата публикации: 2017-08-22.

The structure and its manufacture method of metal-insulating layer-metal capacitor

Номер патента: CN106847787A. Автор: 洪昌贤. Владелец: Powerchip Technology Corp. Дата публикации: 2017-06-13.

Method for manufacturing a trench metal insulator metal capacitor

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In-situ encapsulation of metal-insulator-metal (MIM) stacks for resistive random access memory (RERAM) cells

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Integrated circuits including metal-insulator-metal capacitors and methods of forming the same

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Fabrication of a mim capacitor structure with via etch control with integrated maskless etch tuning layers

Номер патента: US20190333983A1. Автор: Son Nguyen,Joshua M. Rubin. Владелец: International Business Machines Corp. Дата публикации: 2019-10-31.

Metal-insulator-metal capacitor and method for fabricating the same

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On chip MIM capacitor

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High density capacitor structure and method

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Fabrication of a mim capacitor structure with via etch control with integrated maskless etch tuning layers

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High density vertically integrated feol mim capacitor

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Capacitor structure for a logic process

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Methods for forming fin structures for semiconductor devices

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Coating bar and method for manufacturing separator using the same

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High k metal-insulator-metal (mim) capacitor network for lag mitigation

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Damascene metal-insulator-metal (mim) device with improved scaleability

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Damascene metal-insulator-metal (mim) device with improved scaleability

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Damascene metal-insulator-metal (mim) device with improved scaleability

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Damascene metal-insulator-metal (MIM) device

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