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Semiconductor device and method for manufacturing the same

Номер патента: US20230387316A1
Опубликовано: 30-11-2023
Автор(ы): Cheng-Wei LIAN, Chia-Cheng Chen, Chuan-Hui SHEN, Chun-Hung Wu, Hong-Mao Lee, Jhih-Rong Huang, Kuan-Kan HU, Liang-Yin Chen, Lin-Yu HUANG, Min-Chiang CHUANG, Pinyen Lin, Po-Chin Chang, Shuen-Shin Liang, Sung-Li Wang, Szu-Hsian LEE, Tsun-Jen Chan, Yan-Ming Tsai, Yuting CHENG
Принадлежит: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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