Angular rate sensor having a sense element constrained to motion about a single axis and flexibly attached to a rotary drive mass
Опубликовано: 02-01-2003
Автор(ы): John W. Reeds, Ying W. Hsu
Принадлежит: Microsensors Inc
Реферат: Disclosed is a micro-gyro and method of driving a micro-gyro. The method and structure are embodied in a micro-gyro of the type where first flexures extend from an anchor connect to a sense plate, where second flexures extend from the sense plate connect to a drive ring, where the drive ring is driven to oscillate about a drive axis, and where the first flexures constrain the sense plate from moving about the drive axis but permit the sense plate and the attached drive ring to rock about a sense axis. The sense plate, drive ring and flexures form a plate-ring-flexure system that is tuned such that the system rocks about the sense axis in a first or fundamental mode where the plate and ring move substantially in phase at the lowest resonant frequency.
Angular rate sensor having a sense element constrained to motion about a single axis and flexibly attached to a rotary drive mass
Номер патента: EP1440321A4. Автор: John W Reeds,Ying W Hsu. Владелец: Microsensors Inc. Дата публикации: 2006-04-05.