Determining one or more characteristics of light in an optical system
Номер патента: EP3973277A1
Опубликовано: 30-03-2022
Автор(ы): Konstantin Tsigutkin, Larissa Juschkin
Принадлежит: KLA Corp
Опубликовано: 30-03-2022
Автор(ы): Konstantin Tsigutkin, Larissa Juschkin
Принадлежит: KLA Corp
Реферат: Methods and systems for determining one or more characteristics of light in an optical system are provided. One system includes first detector(s) configured to detect light having one or more wavelengths shorter than 190 nm emitted from a light source at one or more first angles mutually exclusive of one or more second angles at which the light is collected from the light source by an optical system for illumination of a specimen and to generate first output responsive to the light detected by the first detector(s). In addition, the system includes a control subsystem configured for determining one or more characteristics of the light at one or more planes in the optical system based on the first output.
Determining one or more characteristics of light in an optical system
Номер патента: WO2020247324A1. Автор: Konstantin Tsigutkin,Larissa Juschkin. Владелец: KLA Corporation. Дата публикации: 2020-12-10.