Sensor array for detecting rotation angle and/or torque
Номер патента: EP1102971A1
Опубликовано: 30-05-2001
Автор(ы): Matthias Moerbe
Принадлежит: ROBERT BOSCH GMBH
Опубликовано: 30-05-2001
Автор(ы): Matthias Moerbe
Принадлежит: ROBERT BOSCH GMBH
Реферат: The invention relates to a sensor array for detecting rotation angle and/or torque in rotational mechanical components (1), wherein a torsion bar (20) is formed between the fixing points of two angle sensors (2, 3, 4, 23, 24). The absolute rotational angle position of the rotational component (1) and the torque exerted on the rotational component (1) may be derived from the difference in rotation angle in the rotational bodies (24) that are coupled to the angle sensors (2, 3, 4, 23, 24).
Method for determining the phase angle and/or the thickness of a contamination layer at an optical element and EUV lithography apparatus
Номер патента: US09618387B2. Автор: Michael Gerhard. Владелец: CARL ZEISS SMT GMBH. Дата публикации: 2017-04-11.