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MEMS chip and manufacturing method therefor

Номер патента: US09580301B2
Опубликовано: 28-02-2017
Автор(ы): Changfeng Xia, Dan DAI, Guoping ZHOU, Xinwei Zhang
Принадлежит: CSMC Technologies Fab1 Co Ltd
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Cover and manufacturing method therefor

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Secondary battery cathode having improved thermal stability and manufacturing method therefor

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Ferritic stainless steel and manufacturing method therefor

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Carrier-foil-attached ultra-thin copper foil facilitating micro-hole processing, copper clad laminate comprising same, and manufacturing methods therefor

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Environmentally-friendly quartz composite board and manufacturing method therefor

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Fire extinguishing air bubble film filled with gaseous fire-extinguishing medium, and manufacturing method therefor

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Iron-aluminum-based plated steel sheet for hot press forming, having excellent hydrogen delayed fracture properties and spot welding properties, and manufacturing method therefor

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Iron-aluminum-based plated steel sheet for hot press forming, having excellent hydrogen delayed fracture properties and spot welding properties, and manufacturing method therefor

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Lightweight sandwich steel sheet using polyamide, and manufacturing method therefor

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Lightweight sandwich steel sheet using polyamide, and manufacturing method therefor

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Non-polymeric tacrolimus drug-eluting stent and manufacturing method therefor

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Optical stack and manufacturing method therefor, and smart window comprising same and vehicle or building window to which same is applied

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Heat exchanger and manufacturing method therefor

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Easy-print packaging sheet and manufacturing method therefor

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Quantum dot light-emitting device and manufacturing method therefor, and display apparatus

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Integrated harness assembly and manufacturing method therefor, automobile, and vehicle

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Steel and steel wire, which are for spring, and manufacturing methods therefor

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Ultra-high strength steel sheet having excellent bendability, and manufacturing method therefor

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Worm wheel of steering system speed reducer, and manufacturing method therefor

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MEMS Chip

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Picture using salt and manufacturing method therefor

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Cold forged gear steel and manufacturing method therefor

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Hot-dipped aluminum-zinc or hot-dipped zinc-aluminum-magnesium multiphase steel having yield strength of greater than or equal to 450 mpa and rapid heat-treatment hot plating manufacturing method therefor

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Exposure mask, method of designing and manufacturing the same, exposure method and apparatus, pattern forming method, and device manufacturing method

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Decorative building material manufactured by using sublimation transfer printing technique and manufacturing method thereof

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Manufacturing method and manufacturing apparatus for calcium formate

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Manufacturing method, manufacturing apparatus, data processing method, data processing apparatus, data carrier

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Electroless plated fiber material, manufacturing method, and manufacturing system therefor

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Ceramic core, manufacturing method for the same, manufacturing method for casting using the ceramic core, and casting manufactured by the method

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Intraocular lens and manufacturing method therefor

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Hot dipped high manganese steel and manufacturing method therefor

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Laminated sheet and manufacturing method therefor

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Humidity sensitive nano-photonics and manufacturing method thereof

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Spectacle lens manufacturing system, manufacturing device, manufacturing method, manufacturing information management system, manufacturing information management device, and manufacturing information management method

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Moisture permeable waterproof fabric and manufacturing method thereof

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Element for neutralising or decreasing toxic level of waste gases and manufacturing method thereof

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Copper alloy tube with excellent high-temperature brazeability and manufacturing method therefor

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Electric valve and manufacturing method therefor

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Wire rod having excellent drawability, and manufacturing method therefor

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Gate-all-around transistor and manufacturing method therefor, and electronic device

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Reinforced bulging tank of launch vehicle and manufacturing method therefor

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Casting product and manufacturing method thereof

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Chip scale light-emitting diode package and manufacturing method thereof

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Tag for marking defective part of electrode for secondary battery and manufacturing method thereof

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Protective film for substrate, manufacturing method thereof, substrate and manufacturing method of display panel

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Nanocrystal film-coated substrate, manufacturing method of same, and manufacturing method of barium zirconate titanate nanocrystal

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Chip scale light-emitting diode package and manufacturing method thereof

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Chemical liquid, manufacturing method of modified substrate, and manufacturing method of laminate

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Coated metal fine particle and manufacturing method thereof

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Grinding tool and manufacturing method therefor

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Both side-recognizable label for identifying defective portion of electrode for secondary battery and manufacturing method therefor

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High-strength hot-dip galvanized steel sheet with excellent plating quality, steel sheet for plating, and manufacturing methods therefor

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