Apparat aus Silica für Halbleiteranordnungsherstellung

28-01-1999 дата публикации

Номер:

DE0069322546D1

Автор: KOBAYASHI MASANORI, YAMAZAKI KEN, OGAWA TSUTOMU, OKUI YOSHIKO, KOBAYASHI, MASANORI, C/O FUJITSU LIMITED, KAWASAKI-SHI, KANAGAWA 211, JP, YAMAZAKI, KEN, C/O FUJITSU LIMITED, KAWASAKI-SHI, KANAGAWA 211, JP, OGAWA, TSUTOMU, C/O FUJITSU LIMITED, KAWASAKI-SHI, KANAGAWA 211, JP, OKUI, YOSHIKO, C/O FUJITSU LIMITED, KAWASAKI-SHI, KANAGAWA 211, JP

Принадлежит: FUJITSU LTD, FUJITSU LTD., KAWASAKI, KANAGAWA, JP

Контакты:

Номер заявки: 46-25-6932

Дата заявки: 18-06-1993

CPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/44 C23C16/440 C23C16/4404 C3 C30 C30B C30B2 C30B25 C30B25/C30B25/0 C30B25/08 C30B3 C30B31 C30B31/C30B31/1 C30B31/10 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/6 H01L21/67 H01L21/671 H01L21/6711 H01L21/67115 H01L21/673 H01L21/6731 H01L21/67313

IPC - классификация

C C0 C03 C03C C03C3 C03C3/C03C3/0 C03C3/06 C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/44 C3 C30 C30B C30B2 C30B25 C30B25/C30B25/0 C30B25/08 C30B3 C30B31 C30B31/C30B31/1 C30B31/10 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/00 H01L21/2 H01L21/22 H01L21/6 H01L21/67 H01L21/673