Deposition of carbon into nitride layer for improved selectivity of oxide to nitride etchrate for self aligned contact etching

14-04-1999 дата публикации

Номер:

EP0908941A2

Автор: Bruno Spuler, Juergen Wittmann, Martin Gutsche, Matthias Ilg, Wolfgang Bergner

Принадлежит: INFINEON TECHNOLOGIES AG, SIEMENS AG

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0217 H01L21/022 H01L21/0227 H01L21/02271 H01L21/2 H01L21/28 H01L21/3 H01L21/30 H01L21/306 H01L21/31 H01L21/318 H01L21/3185 H01L21/7 H01L21/76 H01L21/768 H01L21/7689 H01L21/76897

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/3 C23C16/34 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0217 H01L23 H01L23/H01L23/5 H01L23/53 H01L23/535

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