PROCESS OF PREPARING AN ELECTRICAL ISOLATION FILM AND APPLICATION FOR THE METALLISATION OF THROUGH VIAS

25-05-2011 дата публикации

Номер:

EP2324085A2

Автор: MEVELLEC, Vincent, GONZALEZ, José, SUHR, Dominique

Принадлежит: Alchimer SA

Контакты:

Номер заявки: 36-27-0977.6

Дата заявки: 01-07-2009

CPC - классификация

C C2 C25 C25D C25D1 C25D13 C25D13/C25D13/0 C25D13/04 C25D13/1 C25D13/18 C25D7 C25D7/C25D7/1 C25D7/12 C25D7/123 H H0 H01 H01B H01B3 H01B3/H01B3/1 H01B3/18 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0211 H01L21/02118 H01L21/022 H01L21/0228 H01L21/02282 H01L21/2 H01L21/28 H01L21/288 H01L21/3 H01L21/31 H01L21/312 H01L21/7 H01L21/76 H01L21/768 H01L21/7683 H01L21/76831 H01L21/7684 H01L21/76843 H01L21/7687 H01L21/76873 H01L21/7689 H01L21/76898 H01L29 H01L292 H01L2924 H01L2924/H01L2924/0 H01L2924/00 H01L2924/000 H01L2924/0002

IPC - классификация

C C0 C09 C09D C09D5 C09D5/C09D5/4 C09D5/44 C2 C25 C25D C25D1 C25D13 C25D13/C25D13/0 C25D13/04 C25D13/1 C25D13/18 C25D7 C25D7/C25D7/1 C25D7/12 H H0 H01 H01B H01B3 H01B3/H01B3/1 H01B3/18 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/28 H01L21/288