Method for manufacturing piezoelectric film, piezoelectric film, and piezoelectric element

A method for manufacturing a piezoelectric film comprises: a coating step of applying a coating solution onto a substrate to form a coating film, wherein the coating solution contains lead, zirconium and titanium, has a zirconium/titanium content ratio falling within the range from 54:46 to 40:60 in terms of molar ratio, and can generate a perovskite crystal phase when being heated at a temperature equal to or higher than a crystallization initiation temperature; a drying step of drying the coating film to form a dried film; a first temporary calcination step of heating the dried film at a first temporary calcination temperature to form a first temporary calcination film, wherein the first temporary calcination temperature is equal to or higher than the crystallization initiation temperature and is equal to or lower than a temperature higher by 40 DEG C than the crystallization initiation temperature; a second temporary calcination step of heating the first temporary calcination film at a second temporary calcination temperature to form a second temporary calcination film, wherein the second temporary calcination temperature is equal to or higher than a temperature higher by 25 DEG C than the crystallization initiation temperature, is equal to or lower than a temperature higher by 100 DEG C than the crystallization initiation temperature, and is equal to or higher than a temperature higher by 25 DEG C than the first temporary calcination temperature; and a main calcination step of heating the second temporary calcination film at a main calcination temperature to form a piezoelectric film, wherein the main calcination temperature is equal to or higher than a temperature higher by 100 DEG C than the crystallization initiation temperature, is equal to or lower than a temperature higher by 200 DEG C than the crystallization initiation temperature, and is equal to or higher than a temperature higher by 25 DEG C than the second temporary calcination temperature.