缺陷觀察方法及其裝置

21-11-2016 дата публикации

Номер:

TWI558997B

Автор: Yohei Minekawa, Yuko Otani, Yuji Takagi, MINEKAWA YOHEI, OTANI YUKO, TAKAGI YUJI, MINEKAWA, YOHEI, OTANI, YUKO, TAKAGI, YUJI

Принадлежит: Hitachi High Tech Corp, HITACHI HIGH TECH CORP, HITACHI HIGH-TECHNOLOGIES CORPORATION

Контакты:

Номер заявки: 28-12-10411

Дата заявки: 16-04-2015

CPC - классификация

G G0 G01 G01B G01B1 G01B11 G01B11/G01B11/1 G01B11/14 G01B11/3 G01B11/30 G01N G01N2 G01N20 G01N202 G01N2021 G01N2021/G01N2021/8 G01N2021/88 G01N2021/884 G01N2021/8848 G01N21 G01N21/G01N21/9 G01N21/95 G01N21/950 G01N21/9501 G01N21/956 G01N22 G01N222 G01N2223 G01N2223/G01N2223/3 G01N2223/30 G01N2223/6 G01N2223/64 G01N2223/646 G01N23 G01N23/G01N23/2 G01N23/22 G01N23/220 G01N23/2204 G01N23/225 G01N23/2251 G02 G02B G02B2 G02B21 G02B21/G02B21/0 G02B21/00 G02B21/009 G02B21/0092 G02B21/1 G02B21/10 G02B21/3 G02B21/36 G02B21/361 G02B21/367 G02B5 G02B5/G02B5/3 G02B5/30 G02B5/308 G02B5/3083

IPC - классификация

G G0 G01 G01N G01N2 G01N21 G01N21/G01N21/2 G01N21/21 G01N21/4 G01N21/47 G01N21/9 G01N21/95

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