Semiconductor arrangement and formation thereof

30-04-2019 дата публикации

Номер:

US10276448B2

Автор: Chao-Hsun Wang, Hsien-Cheng WANG, I-Wen Wu, Mei-Yun Wang, Shih-Wen Liu, Yun Lee

Принадлежит: Taiwan Semiconductor Manufacturing Co TSMC Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/8 H01L21/82 H01L21/823 H01L21/8234 H01L21/82343 H01L21/823431 H01L21/82347 H01L21/823475 H01L21/82348 H01L21/823481 H01L21/823487 H01L21/84 H01L21/845 H01L27 H01L27/H01L27/0 H01L27/08 H01L27/088 H01L27/0886 H01L27/1 H01L27/12 H01L27/121 H01L27/1211 H01L29 H01L29/H01L29/7 H01L29/78

IPC - классификация

G G0 G01 G01S G01S1 G01S1/G01S1/6 G01S1/64 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/8 H01L21/84 H01L27 H01L27/H01L27/0 H01L27/08 H01L27/088

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