Methods for loading or unloading substrate with evaporator planet

07-09-2021 дата публикации

Номер:

US0011114329B2

Автор: Michael J. Seddon, Heng Chen Lee, SEDDON MICHAEL J, LEE HENG CHEN, Seddon, Michael J., Lee, Heng Chen

Принадлежит: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC, SEMICONDUCTOR COMPONENTS IND LLC

Контакты:

Номер заявки: 40-45-1673

Дата заявки: 06-01-2020

CPC - классификация

C C2 C23 C23C C23C1 C23C14 C23C14/C23C14/2 C23C14/24 C23C14/5 C23C14/50 C23C14/505 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/022 H01L21/0226 H01L21/02269 H01L21/6 H01L21/67 H01L21/677 H01L21/6773 H01L21/6776 H01L21/67766 H01L21/6778 H01L21/67781 H01L21/68 H01L21/681 H01L21/683 H01L21/6836 H01L21/687 H01L21/6870 H01L21/68707 H01L21/6873 H01L21/68735 H01L21/6877 H01L21/68771

IPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/6 H01L21/67 H01L21/677 H01L21/68 H01L21/683 H01L21/687

Цитирование НПИ

118/503
118/503
118/719
118/730
204/192.1
451/66

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