Substrate processing apparatus

09-04-2024 дата публикации

Номер:

US0011955352B2

Автор: Hiroki Sakurai, Daisuke Goto, Takashi Nakazawa, Yusuke Takamatsu, Yusuke Hashimoto

Принадлежит: Tokyo Electron Limited

Контакты:

Номер заявки: 70-16-1714

Дата заявки: 05-01-2021

CPC - классификация

F F1 F16 F16L F16L5 F16L53 F16L53/F16L53/7 F16L53/70 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/30 H01L21/306 H01L21/3060 H01L21/30604 H01L21/32 H01L21/321 H01L21/3213 H01L21/32134 H01L21/6 H01L21/67 H01L21/670 H01L21/6701 H01L21/67017 H01L21/6705 H01L21/67051 H01L21/6707 H01L21/67075 H01L21/6708 H01L21/672 H01L21/6725 H01L21/67253 H01L21/68 H01L21/687 H01L21/6876 H01L21/68764

IPC - классификация

C C0 C09 C09K C09K1 C09K13 C09K13/C09K13/0 C09K13/08 F F1 F16 F16L F16L5 F16L53 F16L53/F16L53/7 F16L53/70 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/32 H01L21/6 H01L21/67 H01L21/68 H01L21/687

Цитирование НПИ

118/313
134/115R
156/345.21
156/345.23

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