EUV exposure apparatus with reflective elements having reduced influence of temperature variation

11-06-2019 дата публикации

Номер:

US10317802B2

Автор: Franz-Josef Stickel, Gero Wittich, Guido Limbach, Holger Walter, Jan Van Schoot, Markus Hauf, Norman Baer, Oliver Natt, Peter Kuerz, Stefan Hembacher, Timo Laufer, Ulrich Loering, Yim-Bun-Patrick Kwan

Принадлежит: ASML Netherlands BV, CARL ZEISS SMT GMBH

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B8 B82 B82Y B82Y1 B82Y10 B82Y10/B82Y10/0 B82Y10/00 G G0 G02 G02B G02B1 G02B17 G02B17/G02B17/0 G02B17/06 G02B17/064 G02B17/0647 G02B2 G02B27 G02B27/G02B27/0 G02B27/00 G02B27/004 G02B27/0043 G02B27/1 G02B27/18 G02B3 G02B3/G02B3/0 G02B3/00 G02B5 G02B5/G02B5/0 G02B5/00 G02B5/08 G02B5/081 G02B5/0816 G02B5/089 G02B5/0891 G02B7 G02B7/G02B7/1 G02B7/18 G02B7/181 G02B7/1815 G03 G03B G03B2 G03B27 G03B27/G03B27/5 G03B27/54 G03B27/542 G03F G03F7 G03F7/G03F7/7 G03F7/70 G03F7/701 G03F7/7015 G03F7/702 G03F7/7023 G03F7/70233 G03F7/703 G03F7/7031 G03F7/70316 G03F7/708 G03F7/7082 G03F7/70825 G03F7/7089 G03F7/70891 G03F7/709 G03F7/7095 G03F7/70958 G2 G21 G21K G21K1 G21K1/G21K1/0 G21K1/06 G21K1/062 G21K2 G21K22 G21K220 G21K2201 G21K2201/G21K2201/0 G21K2201/06 G21K2201/061 G21K2201/064

IPC - классификация

G G0 G03 G03F G03F7 G03F7/G03F7/7 G03F7/70 G03F7/708 G03F7/7089 G03F7/70891 G2 G21 G21K G21K1 G21K1/G21K1/0 G21K1/06 H H0 H01 H01L H01L2 H01L29 H01L29/H01L29/7 H01L29/77 H01L29/775

Получить PDF