Micro-electro-mechanical system (MEMS) structures and design structures

17-03-2020 дата публикации

Номер:

US10589992B2

Автор: Anthony K. Stamper, Cameron E. LUCE, Christopher V. Jahnes, Eric J. White, Jeffrey C. Maling, Michael T. Brigham, William J. Murphy

Принадлежит: International Business Machines Corp

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B8 B81 B81B B81B2 B81B22 B81B220 B81B2203 B81B2203/B81B2203/0 B81B2203/01 B81B2203/011 B81B2203/0118 B81B2203/03 B81B2203/031 B81B2203/0315 B81B2207 B81B2207/B81B2207/0 B81B2207/09 B81B3 B81B3/B81B3/0 B81B3/00 B81B3/002 B81B3/0021 B81C B81C1 B81C1/B81C1/0 B81C1/00 B81C1/000 B81C1/0004 B81C1/00047 B81C1/001 B81C1/0015 B81C1/002 B81C1/0026 B81C1/00269 B81C1/003 B81C1/0036 B81C1/00365 B81C1/005 B81C1/0053 B81C1/00531 B81C1/009 B81C1/0093 B81C1/00936 B81C2 B81C22 B81C220 B81C2201 B81C2201/B81C2201/0 B81C2201/01 B81C2201/010 B81C2201/0104 B81C2201/0107 B81C2201/012 B81C2201/0121 B81C2201/0125 B81C2201/013 B81C2201/0132 B81C2201/017 B81C2201/0176 B81C2201/018 B81C2201/0181 B81C2203 B81C2203/B81C2203/0 B81C2203/01 B81C2203/010 B81C2203/0109 B81C2203/014 B81C2203/0145 B81C2203/07 B81C2203/071 B81C2203/0714 G G0 G06 G06F G06F1 G06F17 G06F17/G06F17/5 G06F17/50 G06F17/500 G06F17/5009 G06F3 G06F30 G06F30/G06F30/2 G06F30/20

IPC - классификация

G G0 G06 G06F G06F3 G06F30 G06F30/G06F30/1 G06F30/15 G06F30/17 G06F30/18

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