Radiation shield

23-06-2020 дата публикации

Номер:

US10692741B2

Автор: Melvin VERBAAS

Принадлежит: ASM IP Holding BV

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B0 B01 B01J B01J1 B01J15 B01J15/B01J15/0 B01J15/00 C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/45 C23C16/458 C23C16/4586 C23C16/46 C23C16/48 C23C16/481 C23C16/488 C23C16/5 C23C16/52 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/324 H01J37/3244 H01J37/32449 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/670 H01L21/6701 H01L21/67017 H01L21/671 H01L21/6710 H01L21/67103 H01L21/6711 H01L21/67115 H01L21/6716 H01L21/67161 H01L21/6719 H01L21/672 H01L21/6724 H01L21/67248 H01L21/68 H01L21/687 H01L21/6873 H01L21/68735 H01L21/6878 H01L21/68785

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/45 C23C16/458 C23C16/4584 C23C16/46 C23C16/5 C23C16/52

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