METHOD AND SYSTEM FOR IN-SITU AND REGROWTH IN GALLIUM NITRIDE BASED DEVICES

13-02-2014 дата публикации

Номер:

US20140045306A1

Автор: David P. Bour, Hui Nie, Madhan M. Raj, Thomas R. Prunty

Принадлежит: Avogy Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/023 H01L21/0238 H01L21/02389 H01L21/024 H01L21/0245 H01L21/02458 H01L21/025 H01L21/0254 H01L21/026 H01L21/0262 H01L21/0263 H01L21/02634 H01L21/02639 H01L21/0264 H01L21/02642 H01L21/02647 H01L21/3 H01L21/30 H01L21/306 H01L21/3061 H01L21/30612 H01L21/308 H01L21/3086 H01L29 H01L29/H01L29/0 H01L29/06 H01L29/061 H01L29/0619 H01L29/2 H01L29/20 H01L29/200 H01L29/2003 H01L29/6 H01L29/66 H01L29/661 H01L29/6612 H01L29/66121 H01L29/6614 H01L29/66143 H01L29/664 H01L29/6644 H01L29/66446 H01L29/6646 H01L29/66462 H01L29/8 H01L29/86 H01L29/868 H01L29/87 H01L29/872

IPC - классификация

C C3 C30 C30B C30B2 C30B25 C30B25/C30B25/0 C30B25/04 H H0 H01 H01L H01L2 H01L29 H01L29/H01L29/8 H01L29/87 H01L29/872

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