Selective metal removal with flowable polymer

30-11-2023 дата публикации

Номер:

US20230386833A1

Автор: Aixi ZHANG, Bhaskar Jyoti Bhuyan, David Thompson, Feng Q. Liu, James Hugh Connolly, Jiang Lu, Jie Zhang, Liqi Wu, Mark Saly, Rongjun Wang, Wei Dou, Xianmin Tang, Zhimin QI

Принадлежит: Applied Materials Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C2 C23 C23C C23C1 C23C14 C23C14/C23C14/1 C23C14/16 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0211 H01L21/02118 H01L21/027 H01L21/0271 H01L21/2 H01L21/28 H01L21/285 H01L21/2855 H01L21/2856 H01L21/28562 H01L21/3 H01L21/31 H01L21/311 H01L21/3113 H01L21/31138 H01L21/32 H01L21/321 H01L21/3213 H01L21/32135 H01L21/32136 H01L21/32139 H01L21/6 H01L21/67 H01L21/671 H01L21/6718 H01L21/67184 H01L21/7 H01L21/76 H01L21/768 H01L21/7681 H01L21/76816 H01L21/7683 H01L21/76831 H01L21/7687 H01L21/76877 H01L21/76879

IPC - классификация

C C2 C23 C23C C23C1 C23C14 C23C14/C23C14/1 C23C14/16 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/32 H01L21/321 H01L21/3213 H01L21/32139

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