Method of forming single crystalline magnesia spinel film

21-11-1989 дата публикации

Номер:

US4882300A

Автор: Hiroshi Hanafusa, Yasunori Inoue

Принадлежит: Agency of Industrial Science and Technology

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0217 H01L21/02178 H01L21/0219 H01L21/02194 H01L21/022 H01L21/0227 H01L21/02271 H01L21/0229 H01L21/02293 H01L21/3 H01L21/31 H01L21/316 H01L21/3160 H01L21/31608 Y Y1 Y10 Y10S Y10S1 Y10S11 Y10S117 Y10S117/Y10S117/9 Y10S117/90 Y10S14 Y10S148 Y10S148/Y10S148/0 Y10S148/04 Y10S148/041 Y10S148/1 Y10S148/11 Y10S148/118 Y10S148/15

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/3 C23C16/34 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/021 H01L21/0217 H01L21/022 H01L21/0227 H01L21/02274

Получить PDF