Method of manufacturing surface emitting laser, and surface emitting laser, surface emitting laser array, optical scanning device, and image forming apparatus
17-12-2013 дата публикации
Номер:
US8609447B2
Принадлежит: SHOUJI HIROYOSHI, SATO SHUNICHI, ITOH AKIHIRO, HARASAKA KAZUHIRO, RICOH CO LTD, RICOH COMPANY, LTD.
Контакты:
Номер заявки: 25-13-20108568
Дата заявки: 15-03-2010
A disclosed method of manufacturing a surface emitting laser includes laminating a transparent dielectric layer on an upper surface of a laminated body; forming a first resist pattern on an upper surface of the dielectric layer, the first resist pattern including a pattern defining an outer perimeter of a mesa structure and a pattern protecting a region corresponding to one of the relatively high reflection rate part and the relatively low reflection rate part included in an emitting region; etching the dielectric layer by using the first resist pattern as an etching mask; and forming a second resist pattern protecting a region corresponding to an entire emitting region. These steps are performed before the mesa structure is formed.
CPC - классификация
BB3B32B32BB32B3B32B37B32B37/B32B37/1B32B37/14GG0G03G03GG03G1G03G15G03G15/G03G15/0G03G15/00HH0H01H01SH01S2H01S23H01S230H01S2301H01S2301/H01S2301/1H01S2301/17H01S2301/176H01S5H01S5/H01S5/0H01S5/02H01S5/028H01S5/0282H01S5/04H01S5/042H01S5/0425H01S5/04254H01S5/1H01S5/18H01S5/183H01S5/1831H01S5/18313H01S5/1835H01S5/18355H01S5/18358H01S5/1836H01S5/18369H01S5/1837H01S5/18377H01S5/1839H01S5/18391H01S5/3H01S5/32H01S5/320H01S5/3202H01S5/4H01S5/42H01S5/423H04H04NH04N1H04N1/H04N1/0H04N1/04IPC - классификация
HH0H01H01LH01L2H01L21H01L21/H01L21/0H01L21/00H01L27H01L27/H01L27/1H01L27/15H01L29H01L29/H01L29/2H01L29/22H01L3H01L33H01L33/H01L33/0H01L33/00Цитирование НПИ
International Search Report and Written Opinion in PCT/JP2010/054741.Korean official action dated Apr. 15, 2013 (including English translation) in corresponding Korean patent application.