Method of manufacturing surface emitting laser, and surface emitting laser, surface emitting laser array, optical scanning device, and image forming apparatus

17-12-2013 дата публикации
Номер:
US8609447B2
Контакты:
Номер заявки: 25-13-20108568
Дата заявки: 15-03-2010



A disclosed method of manufacturing a surface emitting laser includes laminating a transparent dielectric layer on an upper surface of a laminated body; forming a first resist pattern on an upper surface of the dielectric layer, the first resist pattern including a pattern defining an outer perimeter of a mesa structure and a pattern protecting a region corresponding to one of the relatively high reflection rate part and the relatively low reflection rate part included in an emitting region; etching the dielectric layer by using the first resist pattern as an etching mask; and forming a second resist pattern protecting a region corresponding to an entire emitting region. These steps are performed before the mesa structure is formed.