Gas dispersion apparatus

24-02-2015 дата публикации

Номер:

US8960235B2

Автор: David K. Carlson

Принадлежит: Applied Materials Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/45 C23C16/455 C23C16/4556 C23C16/45565 C23C16/4557 C23C16/45574 F F1 F17 F17D F17D1 F17D1/F17D1/0 F17D1/04 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/324 H01J37/3244 H01J37/326 H01J37/3263 H01J37/32633 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/2 H01L21/20 H01L21/205 H01L21/3 H01L21/30 H01L21/306 H01L21/3065 H01L21/6 H01L21/67 H01L21/670 H01L21/6701 H01L21/67011 Y Y1 Y10 Y10T Y10T1 Y10T13 Y10T137 Y10T137/Y10T137/6 Y10T137/65 Y10T137/657 Y10T137/6579 Y10T137/8 Y10T137/85 Y10T137/859 Y10T137/8593 Y10T137/85938 Y10T137/87 Y10T137/871 Y10T137/8715 Y10T137/87153 Y10T137/872 Y10T137/8726 Y10T137/87265 Y10T137/8728 Y10T137/87281 Y10T137/878 Y10T137/8788 Y10T137/87885

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/45 C23C16/455 C23C16/4556 C23C16/45565 F F1 F17 F17D F17D1 F17D1/F17D1/0 F17D1/04 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/3 H01L21/31 H01L21/311 H01L21/3111 H01L21/31116

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