Electron cyclotron resonance ion source
Номер патента: CA1321229C
Опубликовано: 10-08-1993
Автор(ы): Gerry Dionne, Iwao Watanabe, James G. Hipple, Masaru Shimada, Yasuhiro Torii
Принадлежит: Eaton Corp, Nippon Telegraph and Telephone Corp
Опубликовано: 10-08-1993
Автор(ы): Gerry Dionne, Iwao Watanabe, James G. Hipple, Masaru Shimada, Yasuhiro Torii
Принадлежит: Eaton Corp, Nippon Telegraph and Telephone Corp
Реферат: ABSTRACT OF THE DISCLOSURE An electron cyclotron resonance ion source for an ion implanter. The source includes an ionization chamber surrounded along its length by an electromagnet. A number of extraction electrodes at an output end of the ionization chamber allow positively charged oxygen ions to pass through apertures in the electrodes. The uniformity of the axially aligned magnetic field in the ionization chamber is extended through the extraction electrode by a magnetically permeable electrode and through use of non-magnetically permeable material to mount others of said electrodes.
Electron cyclotron resonance ion source
Номер патента: KR910010099B1. Автор: 야스히로 도리이,마사루 시마다,이와오 와따나베,지.히플 제임스,디오네 게리. Владелец: 프랭크 엠. 사조벡. Дата публикации: 1991-12-16.