Piezoelectric thin film element, and an actuator and a sensor fabricated by using the same .

Piezoelectric thin film element, and an actuator and a sensor fabricated by using the same

Номер патента: US20090236944A1
Опубликовано: 24-09-2009
Автор(ы): Fumihito Oka, Kenji Shibata
Принадлежит: Hitachi Cable Ltd
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

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