Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM.

Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM

Номер патента: US12045009B2
Опубликовано: 23-07-2024
Автор(ы): Changhoon Choi, Gwangsik Park, Myungjun Lee, Wookrae Kim
Принадлежит: SAMSUNG ELECTRONICS CO LTD
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

Digital Holography Microscope (DHM), and Inspection Method and Semiconductor Manufacturing Method Using the DHM

Номер патента: US20190369557A1. Автор: Changhoon Choi,Myungjun Lee,Gwangsik Park,Wookrae Kim. Владелец: SAMSUNG ELECTRONICS CO LTD. Дата публикации: 2019-12-05.

Digital Holography Microscope (DHM), and Inspection Method and Semiconductor Manufacturing Method Using the DHM

Номер патента: US20220276607A1. Автор: Changhoon Choi,Myungjun Lee,Gwangsik Park,Wookrae Kim. Владелец: SAMSUNG ELECTRONICS CO LTD. Дата публикации: 2022-09-01.

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Method and arrangement for holographic nanoparticle tracking analysis (h-nta) in a digital holographic microscope

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Method and arrangement for holographic nanoparticle tracking analysis (h-nta) in a digital holographic microscope

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Method and arrangement for holographic nanoparticle tracking analysis (h-nta) in a digital holographic microscope

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