Arrangement, device, and method for heat treating a multilayer body
Номер патента: EP3918643A1
Опубликовано: 08-12-2021
Автор(ы): Joerg Palm, Martin Fuerfanger, Mike VERDENHALVEN
Принадлежит: CNBM Bengbu Design and Research Institute for Glass Industry Co Ltd
Опубликовано: 08-12-2021
Автор(ы): Joerg Palm, Martin Fuerfanger, Mike VERDENHALVEN
Принадлежит: CNBM Bengbu Design and Research Institute for Glass Industry Co Ltd
Реферат: An arrangement (102) for heat treating a multilayer body (1), which arrangement comprises an energy source (16, 7, 11) with at least one radiant heater for generating heating radiation (6, 8), a multilayer body (1), and an intermediate element (15, 5, 12) arranged between the energy source (16, 7, 11) and the multilayer body (1). According to a first alternative, the intermediate element (15, 5, 12) includes a surface element (17) implemented in the form of a flexible film (18). According to a second alternative, the intermediate element (15, 5, 12) includes a surface element (17) implemented in the form of a flexible film (18) or a rigid plate (19), wherein the surface element (17) has a surface (27) facing the energy source (16, 7, 11), which surface can be irradiated by the heating radiation (6, 8), wherein the surface (27) facing the energy source (16, 7, 11) is mechanically supported by a supporting device (22, 23, 25, 26) in the direction toward the energy source (16, 7, 11).
Semiconductor device and patterning method for plated electrode thereof
Номер патента: US9570635B2. Автор: Tsun-Neng Yang,Wei-Yang Ma,Cheng-Dar Lee,Yu-Han Su. Владелец: Institute of Nuclear Energy Research. Дата публикации: 2017-02-14.