Antireflective coating compositions
Номер патента: EP2152822A2
Опубликовано: 17-02-2010
Автор(ы): Hengpeng Wu, Hong Zhuang, Jian Yin, Jianhui Shan, ZHONG Xiang
Принадлежит: AZ Electronic Materials USA Corp
Опубликовано: 17-02-2010
Автор(ы): Hengpeng Wu, Hong Zhuang, Jian Yin, Jianhui Shan, ZHONG Xiang
Принадлежит: AZ Electronic Materials USA Corp
Реферат: The present invention relates to anti reflective coating compositions.
Antireflective coating compositions
Номер патента: WO2008139320A2. Автор: ZHONG Xiang,Jian Yin,Hengpeng Wu,Jianhui Shan,Hong Zhuang. Владелец: AZ ELECTRONIC MATERIALS USA CORP.. Дата публикации: 2008-11-20.