Projection objective for a microlithography apparatus with improved imaging properties and method for improving the imaging properties of the projection objective .

Projection objective for a microlithography apparatus with improved imaging properties and method for improving the imaging properties of the projection objective

Номер патента: WO2008037496A2
Опубликовано: 03-04-2008
Автор(ы): Andreas Bertele, Andreas Frommeyer, Armin Schoeppach, Artur Hoegele, Baerbel Schwaer, Benjamin Sigel, Jochen Schwaer, Klaus Rief, Mariella Beckenbach, Sascha Bleidistel, Thomas Schletterer, Toralf Gruner, Wolfgang Hummel
Принадлежит: Carl Zeiss Smt Ag
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Рисунок 1. Взаимосвязь патентов (ближайшие 20).

Projection objective for a microlithography apparatus with improved imaging properties and method for improving the imaging properties of the projection objective

Номер патента: WO2008037496A3. Автор: Armin Schoeppach,Toralf Gruner,Mariella Beckenbach,Klaus Rief,Andreas Bertele,Benjamin Sigel,Sascha Bleidistel,Wolfgang Hummel,Andreas Frommeyer,Jochen Schwaer,Baerbel Schwaer,Thomas Schletterer,Artur Hoegele. Владелец: Zeiss Carl Smt Ag. Дата публикации: 2008-06-19.

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