Three- wavelengths interferometric measuring device and method
Номер патента: EP4367470A1
Опубликовано: 15-05-2024
Автор(ы): Christian AM WEG, Pawel Drabarek, Peter Eiswirt, Thilo MAY
Принадлежит: Taylor Hobson Ltd
Опубликовано: 15-05-2024
Автор(ы): Christian AM WEG, Pawel Drabarek, Peter Eiswirt, Thilo MAY
Принадлежит: Taylor Hobson Ltd
Реферат: The disclosure relates to an interferometric measuring device (10) for measuring a surface (2, 4) or profile of an object (1), the measuring device (10) comprising: - a beam generating unit (20) operable to generate a measurement beam (BM) with a spectral component at a wavelength smaller than 550 nm,- a splitter (55) to branch off an object beam (BO) and a reference beam (BR) from the measurement beam (BM), - a measurement probe (50) connected to the beam generating unit (20), configured to direct the object beam (BO) onto the surface (2, 4) and to capture a portion of the object beam reflected from the surface (2, 4) as a signal beam (BS), - a signal analyzer (80) connected to a detector unit (70) and operable to derive a distance (D) between the measurement probe (50) and the surface (2, 4) on the basis of signals obtained from first and second detectors (71, 72) being operable to detect first and second partial beams (BP1, BP2) from an analysis beam (BA) being a recombination of the signal beam (BS) and the reference beam (BR).
Form measuring device and method of aligning form data
Номер патента: US8521470B2. Автор: Tomonori Goto,Jyota Miyakura. Владелец: Mitutoyo Corp. Дата публикации: 2013-08-27.