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System and Method of Measuring Refractive Index of EUV Mask Absorber

Номер патента: US20210382398A1
Опубликовано: 09-12-2021
Автор(ы): Herng Yau Yoong, Huajun Liu, Vibhu Jindal, Wen Xiao
Принадлежит: Applied Materials Inc
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