Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of rtp tool
Номер патента: AU2003259989A1
Опубликовано: 11-03-2004
Автор(ы): David Tao, Douglas Brown, Mathias Koch, Robert David Meadows
Принадлежит: Axcelis Technologies Inc
Опубликовано: 11-03-2004
Автор(ы): David Tao, Douglas Brown, Mathias Koch, Robert David Meadows
Принадлежит: Axcelis Technologies Inc
Probe for temperature measurement, temperature measuring system and temperature measuring method using the same
Номер патента: US20110222581A1. Автор: Tatsuo Matsudo. Владелец: Tokyo Electron Ltd. Дата публикации: 2011-09-15.