Method and apparatus for controlling nucleation in self-assembled films
Номер патента: EP1896194A1
Опубликовано: 12-03-2008
Автор(ы): Ya-Hong Xie
Принадлежит: UNIVERSITY OF CALIFORNIA
Опубликовано: 12-03-2008
Автор(ы): Ya-Hong Xie
Принадлежит: UNIVERSITY OF CALIFORNIA
Реферат: A method of forming a self-assembled film with periodic nanometer dimension features (e.g., holes) on a substrate includes the steps of providing film precursors on the substrate, wherein the film precursors are maintained in an amorphous state. Where the film precursors are block copolymers, a heating member is provided. The substrate and the heating member are then moved relative to one another so as to raise the temperature of a portion of the film precursor on the substrate above its glass transition temperature. Relative movement between the substrate and heating member continues until a self-assembled crystalline film is formed over the surface of the substrate. In an alternative embodiment, a pH dispensing member is provided to dispense a pH adjusting agent onto the substrate that promotes self-assembly of a crystalline film.
Method and apparatus for controlling nucleation in self-assembled films
Номер патента: EP1896194A4. Автор: Ya-Hong Xie. Владелец: UNIVERSITY OF CALIFORNIA. Дата публикации: 2010-12-08.