Acid Generator, Sulfonic Acid, Sulfonic Acid Derivatives And Radiation-Sensitive Resin Composition

14-10-2008 дата публикации

Номер:

KR100863119B1

Автор: 다쯔야 도네리, 도모끼 나가이, 사또시 에바따, 에이지 요네다, 용 왕, 유끼오 니시무라, 하루오 이와사와

Принадлежит: 제이에스알 가부시끼가이샤

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C0 C07 C07C C07C2 C07C26 C07C260 C07C2602 C07C2602/C07C2602/4 C07C2602/42 C07C2603 C07C2603/C07C2603/8 C07C2603/86 C07C3 C07C30 C07C309 C07C309/C07C309/1 C07C309/17 C07C309/19 C07C309/2 C07C309/23 C07C38 C07C381 C07C381/C07C381/1 C07C381/12 C07D C07D3 C07D33 C07D333 C07D333/C07D333/4 C07D333/46 C07D333/7 C07D333/78 C07D335 C07D335/C07D335/0 C07D335/02 C07D34 C07D347 C07D347/C07D347/0 C07D347/00 G G0 G03 G03F G03F7 G03F7/G03F7/0 G03F7/00 G03F7/004 G03F7/0045 G03F7/03 G03F7/039 G03F7/0392 G03F7/07 G03F7/075 G03F7/0757 Y Y1 Y10 Y10S Y10S4 Y10S43 Y10S430 Y10S430/Y10S430/1 Y10S430/11 Y10S430/114 Y10S430/115

IPC - классификация

C C0 C07 C07C C07C3 C07C38 C07C381 C07C381/C07C381/1 C07C381/12 C07D C07D3 C07D33 C07D333 C07D333/C07D333/4 C07D333/46 C07D34 C07D347 C07D347/C07D347/0 C07D347/00

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