Apparatus for forming gas blocking layer and method thereof

15-08-2017 дата публикации

Номер:

US09732419B2

Автор: Jun Young Lee, Munpyo Hong, You Jong Lee, Yun-Sung Jang

Принадлежит: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B0 B05 B05D B05D1 B05D1/B05D1/6 B05D1/62 C C2 C23 C23C C23C1 C23C14 C23C14/C23C14/0 C23C14/08 C23C14/086 C23C14/2 C23C14/22 C23C14/225 C23C14/3 C23C14/34 C23C14/346 C23C14/3464 C23C14/35 C23C16 C23C16/C23C16/0 C23C16/00 C23C16/2 C23C16/22 C23C16/4 C23C16/44 H H0 H01 H01J H01J2 H01J22 H01J223 H01J2237 H01J2237/H01J2237/3 H01J2237/33 H01J2237/332 H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/323 H01J37/3235 H01J37/32357 H01J37/324 H01J37/3242 H01J37/32422 H01J37/34 H01J37/341 H01J37/3417 H01J37/347 H01L H01L5 H01L51 H01L51/H01L51/5 H01L51/52 H01L51/525 H01L51/5256 H1 H10 H10K H10K5 H10K50 H10K50/H10K50/8 H10K50/84 H10K50/844 H10K50/8445

IPC - классификация

B B8 B82 B82Y B82Y1 B82Y15 B82Y15/B82Y15/0 B82Y15/00 C C2 C23 C23C C23C1 C23C14 C23C14/C23C14/0 C23C14/08 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/34

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