Apparatus for discharging chemical liquid and method of discharging chemical liquid

26-04-2022 дата публикации

Номер:

US0011312127B2

Автор: Chulwoo Kim, Beomjeong Oh

Принадлежит: SEMES CO., LTD.

Контакты:

Номер заявки: 33-86-1686

Дата заявки: 07-05-2020

CPC - классификация

B B4 B41 B41J B41J1 B41J11 B41J11/B41J11/0 B41J11/00 B41J11/008 B41J11/4 B41J11/46 B41J2 B41J2/B41J2/0 B41J2/01 B41J2/04 B41J2/045 B41J2/0450 B41J2/04505 B41J2/0457 B41J2/04573 B41J2/0458 B41J2/04581 B41J2/04586 B41J2/07 B41J2/1 B41J2/11 B41J2/14 B41J29 B41J29/B41J29/3 B41J29/38 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/022 H01L21/0228 H01L21/02288 H01L21/023 H01L21/0230 H01L21/02307 H01L21/6 H01L21/67 H01L21/670 H01L21/6705 H01L21/67051 H01L21/671 H01L21/6715 H01L21/672 H01L21/6725 H01L21/67259 H01L21/68 H01L21/683

IPC - классификация

B B4 B41 B41F B41F3 B41F3/B41F3/1 B41F3/10 B41J B41J1 B41J11 B41J11/B41J11/4 B41J11/46 B41J2 B41J2/B41J2/0 B41J2/04 B41J2/045 B41J3 B41J3/B41J3/4 B41J3/46

Цитирование НПИ

118/665
347/9

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