Active learning for defect classifier training

14-07-2020 дата публикации

Номер:

US10713769B2

Автор: Brian Duffy, Jing Zhang, Kris Bhaskar, Michael Daino, Richard Wallingford, Yujie Dong

Принадлежит: KLA Tencor Corp

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

G G0 G03 G03F G03F7 G03F7/G03F7/7 G03F7/70 G03F7/706 G03F7/7065 G03F7/7067 G03F7/70675 G06 G06F G06F1 G06F17 G06F17/G06F17/1 G06F17/18 G06F18 G06F18/G06F18/2 G06F18/24 G06F18/243 G06F18/2431 G06F18/4 G06F18/40 G06K G06K9 G06K9/G06K9/6 G06K9/62 G06K9/625 G06K9/6253 G06K9/628 G06N G06N2 G06N20 G06N20/G06N20/0 G06N20/00 G06N3 G06N3/G06N3/0 G06N3/04 G06N3/047 G06N3/0472 G06N3/08 G06N3/088 G06N7 G06N7/G06N7/0 G06N7/00 G06N7/005 G06N7/01 G06T G06T2 G06T22 G06T220 G06T2207 G06T2207/G06T2207/2 G06T2207/20 G06T2207/200 G06T2207/2008 G06T2207/20081 G06T2207/3 G06T2207/30 G06T2207/301 G06T2207/3014 G06T2207/30148 G06T7 G06T7/G06T7/0 G06T7/00 G06T7/000 G06T7/0004 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/6 H01L21/67 H01L21/672 H01L21/6724 H01L21/67242 H01L22 H01L22/H01L22/1 H01L22/12 H01L22/2 H01L22/24 H01L22/3 H01L22/30

IPC - классификация

G G0 G06 G06N G06N2 G06N20 G06N20/G06N20/0 G06N20/00 G06Q G06Q1 G06Q10 G06Q10/G06Q10/1 G06Q10/10 G06Q10/107 H H0 H04 H04L H04L4 H04L41 H04L41/H04L41/5 H04L41/50 H04L41/507 H04L41/5074

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