Self-aligned multilayer spacer matrix for high-density transistor arrays and methods for forming the same

05-11-2024 дата публикации

Номер:

US12137573B2

Автор: Chien-Hao Huang, Chung-Te Lin, Gao-Ming Wu, Katherine H. Chiang

Принадлежит: Taiwan Semiconductor Manufacturing Co TSMC Ltd

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L29 H01L29/H01L29/2 H01L29/24 H1 H10 H10B H10B4 H10B41 H10B41/H10B41/2 H10B41/20 H10B41/3 H10B41/30 H10B41/4 H10B41/40 H10B43 H10B43/H10B43/2 H10B43/20 H10B43/3 H10B43/30 H10B43/4 H10B43/40 H10B5 H10B53 H10B53/H10B53/3 H10B53/30 H10B6 H10B61 H10B61/H10B61/2 H10B61/22 H10B63 H10B63/H10B63/1 H10B63/10 H10B63/3 H10B63/30 H10B63/8 H10B63/80 H10N H10N7 H10N70 H10N70/H10N70/0 H10N70/01 H10N70/011 H10N70/2 H10N70/23 H10N70/231 H10N70/24 H10N70/25 H10N70/8 H10N70/82 H10N70/823 H10N70/88 H10N70/883 H10N70/8833

IPC - классификация

H H0 H01 H01L H01L2 H01L29 H01L29/H01L29/7 H01L29/78 H01L29/786 H01L29/7869

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