Ion sources, systems and methods

12-07-2007 дата публикации

Номер:

US2007158557A1

Автор: WARD BILLY W, NOTTE JOHN A IV, FARKAS LOUIS S III, PERCIVAL RANDALL G, HILL RAYMOND, WARD BILLY W., NOTTE JOHN A.IV, FARKAS LOUIS S.III, PERCIVAL RANDALL G.

Принадлежит:

Контакты:

Номер заявки: 06-15-6005

Дата заявки: 15-11-2006

Ion sources, systems and methods are disclosed.

CPC - классификация

B B8 B82 B82Y B82Y1 B82Y10 B82Y10/B82Y10/0 B82Y10/00 B82Y4 B82Y40 B82Y40/B82Y40/0 B82Y40/00 H H0 H01 H01J H01J2 H01J22 H01J223 H01J2237 H01J2237/H01J2237/0 H01J2237/08 H01J2237/080 H01J2237/0807 H01J2237/2 H01J2237/20 H01J2237/202 H01J2237/2022 H01J2237/20228 H01J2237/25 H01J2237/256 H01J2237/2566 H01J2237/26 H01J2237/262 H01J2237/2623 H01J2237/28 H01J2237/281 H01J2237/2812 H01J2237/3 H01J2237/30 H01J2237/304 H01J2237/3043 H01J2237/30438 H01J2237/31 H01J2237/317 H01J2237/3174 H01J2237/3175 H01J2237/31755 H01J27 H01J27/H01J27/2 H01J27/26 H01J3 H01J37 H01J37/H01J37/0 H01J37/08 H01J37/2 H01J37/20 H01J37/25 H01J37/252 H01J37/28 H01J37/3 H01J37/30 H01J37/305 H01J37/3056 H01J37/31 H01J37/317 H01J37/3174

IPC - классификация

G G2 G21 G21K G21K7 G21K7/G21K7/0 G21K7/00