Multizone control of lamps in a conical lamphead using pyrometers

18-09-2014 дата публикации

Номер:

US20140273419A1

Автор: BALASUBRAMANIAN Ramachandran, Jose Antonio Marin, Joseph M. Ranish, Mehmet Tugrul Samir, Paul Brillhart, Satheesh Kuppurao, Swaminathan T. Srinivasan

Принадлежит: Applied Materials Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/4 C23C16/45 C23C16/458 C23C16/4583 C23C16/48 C23C16/481 C23C16/5 C23C16/52 C3 C30 C30B C30B2 C30B25 C30B25/C30B25/0 C30B25/08 C30B25/1 C30B25/10 C30B25/105 C30B25/12 C30B25/14 C30B25/16 G G0 G01 G01J G01J2 G01J20 G01J200 G01J2005 G01J2005/G01J2005/1 G01J2005/10 G01J2005/106 G01J5 G01J5/G01J5/0 G01J5/00 G01J5/000 G01J5/0007 G01J5/1 G01J5/10 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/026 H01L21/0262 H01L21/3 H01L21/32 H01L21/324 H01L21/6 H01L21/67 H01L21/671 H01L21/6711 H01L21/67115 H01L21/672 H01L21/6724 H01L21/67248 H01L21/68 H01L21/683 H01L22 H01L22/H01L22/1 H01L22/10 H01L22/2 H01L22/20

IPC - классификация

C C3 C30 C30B C30B2 C30B25 C30B25/C30B25/0 C30B25/08 C30B25/1 C30B25/10 C30B25/105 C30B3 C30B31 C30B31/C30B31/1 C30B31/14

Получить PDF