Carbon tips with expanded bases grown with simultaneous application of carbon source and etchant gases

18-11-2003 дата публикации

Номер:

US6649431B2

Автор: Douglas H. Lowndes, Michael A. Guillorn, Michael L. Simpson, Vladimir I. Merkulov

Принадлежит: UT Battelle LLC

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B8 B82 B82Y B82Y1 B82Y15 B82Y15/B82Y15/0 B82Y15/00 H H0 H01 H01J H01J1 H01J1/H01J1/3 H01J1/30 H01J1/304 H01J1/3044 H01J2 H01J22 H01J220 H01J2201 H01J2201/H01J2201/3 H01J2201/30 H01J2201/304 H01J2201/3044 H01J2201/30446 H01J9 H01J9/H01J9/0 H01J9/02 H01J9/025 Y Y1 Y10 Y10S Y10S9 Y10S97 Y10S977 Y10S977/Y10S977/9 Y10S977/93 Y10S977/939

IPC - классификация

B B8 B82 B82Y B82Y1 B82Y15 B82Y15/B82Y15/0 B82Y15/00 G G0 G08 G08B G08B5 G08B5/G08B5/1 G08B5/14 H H0 H01 H01J H01J9 H01J9/H01J9/0 H01J9/02 H01J9/025

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