Ion sources, systems and methods

03-02-2009 дата публикации

Номер:

US7485873B2

Автор: Billy W. Ward, Dirk Aderhold, John A. Notte, IV, Klaus Edinger, Lars Markwort, Louis S. Farkas, Iii, Randall G. Percival, Raymond Hill, Ulrich Mantz

Принадлежит: Alis Corp

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B8 B82 B82Y B82Y1 B82Y10 B82Y10/B82Y10/0 B82Y10/00 B82Y4 B82Y40 B82Y40/B82Y40/0 B82Y40/00 H H0 H01 H01J H01J2 H01J22 H01J223 H01J2237 H01J2237/H01J2237/0 H01J2237/08 H01J2237/080 H01J2237/0807 H01J2237/2 H01J2237/20 H01J2237/202 H01J2237/2022 H01J2237/20228 H01J2237/25 H01J2237/256 H01J2237/2566 H01J2237/26 H01J2237/262 H01J2237/2623 H01J2237/28 H01J2237/281 H01J2237/2812 H01J2237/3 H01J2237/30 H01J2237/304 H01J2237/3043 H01J2237/30438 H01J2237/31 H01J2237/317 H01J2237/3174 H01J2237/3175 H01J2237/31755 H01J27 H01J27/H01J27/2 H01J27/26 H01J3 H01J37 H01J37/H01J37/0 H01J37/08 H01J37/2 H01J37/20 H01J37/25 H01J37/252 H01J37/28 H01J37/3 H01J37/30 H01J37/305 H01J37/3056 H01J37/31 H01J37/317 H01J37/3174

IPC - классификация

B B8 B82 B82Y B82Y2 B82Y25 B82Y25/B82Y25/0 B82Y25/00 G G0 G03 G03F G03F1 G03F1/G03F1/2 G03F1/24 H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/2 H01J37/20

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