Method to produce nanometer-sized features with directed assembly of block copolymers

07-04-2015 дата публикации

Номер:

US8999492B2

Автор: Dan B. Millward, Gurtej S. Sandhu

Принадлежит: Micron Technology Inc

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

B B0 B05 B05D B05D1 B05D1/B05D1/2 B05D1/28 B05D1/283 B4 B41 B41N B41N1 B41N1/B41N1/0 B41N1/08 B41N3 B41N3/B41N3/0 B41N3/03 B41N3/036 B8 B81 B81C B81C2 B81C22 B81C220 B81C2201 B81C2201/B81C2201/0 B81C2201/01 B81C2201/014 B81C2201/0149 B81C9 B81C99 B81C99/B81C99/0 B81C99/00 B81C99/009 B82 B82B B82B3 B82B3/B82B3/0 B82B3/00 B82Y B82Y1 B82Y10 B82Y10/B82Y10/0 B82Y10/00 B82Y3 B82Y30 B82Y30/B82Y30/0 B82Y30/00 B82Y4 B82Y40 B82Y40/B82Y40/0 B82Y40/00 G G0 G03 G03F G03F1 G03F1/G03F1/6 G03F1/68 G03F7 G03F7/G03F7/0 G03F7/00 G03F7/000 G03F7/0002 G03F7/001 G03F7/0017 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/02 H01L21/027 H01L21/0274 Y Y0 Y02 Y02C Y02C2 Y02C20 Y02C20/Y02C20/3 Y02C20/30 Y1 Y10 Y10T Y10T4 Y10T42 Y10T428 Y10T428/Y10T428/2 Y10T428/24 Y10T428/248 Y10T428/2480 Y10T428/24802

IPC - классификация

B B8 B82 B82Y B82Y2 B82Y25 B82Y25/B82Y25/0 B82Y25/00 B82Y3 B82Y30 B82Y30/B82Y30/0 B82Y30/00 G G0 G03 G03F G03F1 G03F1/G03F1/2 G03F1/24

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