Gradient oxidation and etch for pvd metal as bottom liner in bottom up gap fill

02-11-2023 дата публикации

Номер:

WO2023211583A1

Автор: Aixi ZHANG, Annamalai Lakshmanan, Chih-Hsun Hsu, Chun-Chieh Wang, Jiang Lu, Jie Zhang, Liqi Wu, Meng-Shan WU, Rongjun Wang, ShihChung Chen, Shiyu Yue, Tsung-Han Yang, Wei Lei, Xianmin Tang, Yi Xu, Yixiong Yang, Yu Lei, Zhimin QI, Ziye XIONG

Принадлежит: Applied Materials, Inc.

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/28 H01L21/285 H01L21/2855 H01L21/6 H01L21/67 H01L21/670 H01L21/6706 H01L21/67063 H01L21/671 H01L21/6719 H01L21/7 H01L21/76 H01L21/768 H01L21/7682 H01L21/76826 H01L21/7683 H01L21/76831 H01L21/7684 H01L21/76843 H01L21/7686 H01L21/76865 H01L21/7687 H01L21/76871 H01L21/76876 H01L21/76877 H01L21/76879 H01L23 H01L23/H01L23/5 H01L23/52 H01L23/522 H01L23/5226 H01L23/53 H01L23/532 H01L23/5326 H01L23/53266

IPC - классификация

C C2 C23 C23C C23C1 C23C16 C23C16/C23C16/1 C23C16/14 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/7 H01L21/76 H01L21/764 H01L23 H01L23/H01L23/5 H01L23/52 H01L23/522 H01L23/5226

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