Method of and apparatus for operating a cyclotron
Реферат: 1378624 Cyclic particle accelerators CYCLOTRON CORP 19 Jan 1973 [4 Feb 1972] 2991/73 Heading H1D In a method of operating an isochronous cyclotron which permits the use of an increased beam current, the axial height of the beam in the cyclotron orbits near and at an internal target, or an extraction radius, is increased by applying in the region of those orbits a vertical time-varying electric field tuned to the natural axial oscillation frequency of the beam in the orbits, thereby partially offsetting the strong natural vertical focusing in the fringe field of the cyclotron, and decreasing the power density dissipated at the target or extraction system. The vertical field is produced by a tunable r.f. generator (Fig. 4, not shown) coupled by copper cooling leads to a pair of copper deflection plates which are shielded from the r.f. accelerating field of the dees by a conductive shield.
Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer
Номер патента: US20230060400A1. Автор: Naohiko Okunishi,SeungBo SHIM,Byeongsang KIM,Donghyeon NA,Kuihyun YOON,Namkyun Kim,Dongseok Han,Minyoung HUR,Yoonbum Nam. Владелец: SAMSUNG ELECTRONICS CO LTD. Дата публикации: 2023-03-02.