Manufacturing method of master template and stamp of grating of diffractive optic element, master template and stamp
Номер патента: EP4267996A1
Опубликовано: 01-11-2023
Автор(ы): Ismo Vartiainen, Mikhail ERDMANIS
Принадлежит: DISPELIX OY
Опубликовано: 01-11-2023
Автор(ы): Ismo Vartiainen, Mikhail ERDMANIS
Принадлежит: DISPELIX OY
Реферат: A manufacturing method of a master template (20) of a grating of a diffractive optic element. A layer (250) of material (200) is deposited on a substrate (108) of the master template (180) through perforations (204) of a plate (202), cross sectional areas of the perforations (204) depending on locations of the perforations (204) in the plate (202), and the plate (202) and the substrate (108) being spaced at a non-zero distance (D) from each other. Height of the at least one layer (250) on the substrate (108) is caused to vary with variation of the areas of the perforations (204). Raised formations (180) are formed on the substrate (108) by removing the at least one layer (250) from areas, which result in lowered formations (182) between the raised formations (180). A fill factor and height of the raised formations (180) are made to be proportional with each other while the raised and lowered formations (180, 182) have a relation with grooves (902) and ridges (900) of the grating (904), the relation depending on the proportionality.
Manufacturing method of master template and stamp of grating of diffractive optic element, master template and stamp
Номер патента: WO2022136733A1. Автор: Ismo Vartiainen,Mikhail ERDMANIS. Владелец: DISPELIX OY. Дата публикации: 2022-06-30.