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Apparatus and method for mechanical and/or chemical-mechanical planarization of micro-device workpieces

Номер патента: US7115016B2
Опубликовано: 03-10-2006
Автор(ы): Nagasubramaniyan Chandrasekaran
Принадлежит: Micron Technology Inc
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Inkjet assembly, inkjet printing apparatus and inkjet printing method for use in preparation of display component

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Hydrogen supply apparatus and hydrogen supply method for measuring fuel consumption of hydrogen fuel vehicle

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Devices and methods for converting thermal, mechanical and/or electrical energy quantities

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Systems and methods for controlling release of transferable semiconductor structures

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Systems and methods for controlling release of transferable semiconductor structures

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Appratus and method for filtrating oil-containing drainage water, and method and apparatus for restoring filtration membrane device

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Quenching apparatus and quenching method for metal sheet, and method for manufacturing steel sheet

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Apparatus and method for processing foodstuffs with liquid

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Apparatus and method for marking objects on different faces

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Apparatus and method for processing foodstuffs with liquid

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Apparatus and method for processing foodstuffs with liquid

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Vaporization apparatus and method for controlling the same

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Vaporization apparatus and method for controlling the same

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X-ray reference object, x-ray detector, additive manufacturing apparatus and method for calibrating the same

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Material vehicle, traction apparatus and system, and method for controlling bidirectional traveling of material vehicle

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Rapid freeze-quench device and methods of use thereof

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Material vehicle, traction apparatus and system, and method for controlling bidirectional traveling of material vehicle

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Apparatus and method for weeding a multilayer sheet comprising a support liner and at least one adhesive film coupled with the liner

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Micro device transfer apparatus and method

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Rail having an identification marker, and apparatus and method for identifying the rail

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Appartus and method for printing on media and detecting information magnetically recorded on the media

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Stacking apparatus and stacking method

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Recording apparatus and color measuring method for recording apparatus

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Image processing apparatus and image processing method for a printing apparatus

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Drawing apparatus and drawing method for drawing apparatus

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Supply apparatus and supply method for supplying fluid carbon dioxide

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Molding apparatus and molding method for overmolding a sheet

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System and method for crumpling paper substrates

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Liquid discharge apparatus and discharge control method for liquid discharge apparatus

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Control apparatus and control method for ac rotary machine, and electric power steering apparatus

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Molding apparatus and molding method for overmolding a sheet

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Control apparatus and control method for sunroof of vehicle, and vehicle

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Lane detection apparatus and operating method for the same

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System and method for designing and manufacturing objects having an optimised free-form with novel composite materials and the resulting object

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Laser machining apparatus and control device

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Tightening apparatus, and control method and control device applied to tightening apparatus

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Wafer-level manufacture of micro-devices and related two-piece devices, in particular micro-optical systems

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Laser machining apparatus and control device

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Cleaning apparatus and cleaning method for pcb board

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Press forming apparatus and press forming method for a semi-solid metal material

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Liquid ejecting apparatus and liquid supplying method for liquid ejecting apparatus

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Quantum dot film and preparation method therefor, photoelectric device, display apparatus and preparation method for quantum dot light-emitting device

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Liquid ejection device, cleaning apparatus and cleaning method for module substrate

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Malfunction diagnosis apparatus and malfunction diagnosis method for wireless power transmission system

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Liquid ejecting apparatus and liquid supply method for liquid ejecting apparatus

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Ink jet printing apparatus and ejection recovery method for printing head

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Exhaust gas purification apparatus and reductant dispensing method for internal combustion engine

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Multistage drying apparatus and multistage drying method for sheet material to be treated

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Liquid ejection head, liquid ejection apparatus and manufacturing method for liquid ejection head

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Electrostatic spraying apparatus, and current control method for electrostatic spraying apparatus

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Sheet material cutting apparatus, and associated method

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Printing apparatus and driving control method for printhead

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Recording apparatus and data processing method for recording apparatus

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Printing Apparatus and Printing Control Method for Determining Whether and Where to Print a Watermark Relative to Print Data

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Vehicular apparatus, and time synchronization method for vehicular apparatus

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DETERIORATION DIAGNOSIS APPARATUS FOR MECHANICAL APPARATUS, DETERIORATION DIAGNOSIS METHOD FOR MECHANICAL APPARATUS PERFORMED IN DETERIORATION DIAGNOSIS APPARATUS, AND DETERIORATION DIAGNOSIS METHOD FOR MECHANICAL APPARATUS

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Electrode plate supporting device, laser cutting apparatus and laser cutting method for electrode plate

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Laser annealing apparatus and laser annealing method for substrate

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Systems and methods for fabrication of superconducting integrated circuits

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Transfer material, printed material, and manufacturing method for printed material

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Transfering apparatus and method of micro device

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Liquid ejection head, recording apparatus and heat radiation method for liquid ejection head

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Wafer-level passivation structure of micro-device, micro-device comprising the same and methods of manufacturing those

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Transporting apparatus and method for transporting a strip metal roll

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Combustion control apparatus and combustion control method for engine

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Safety system and method for cutting machine

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Safety system and method for cutting machine

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Welding apparatus and a welding method for separator of electrical device

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Wafer-level manufacture of micro-devices and related two-piece devices, in particular micro-optical systems

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Wafer-level manufacture of micro-devices and related two-piece devices, in particular micro-optical systems

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Appratus and method for filtrating oil-containing drainage water, and method and apparatus for restoring filtration membrane device

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Aerogel compositions and methods

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Mounted structure of semiconductor element, manufacturing method of micro-device, liquid droplet ejection head, manufacturing method of liquid droplet ejection head, liquid droplet ejection apparatus

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Aerogel compositions and methods

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Production line detection apparatus and method

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Beverage dispensing apparatus and method for active pressure control thereof

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Beverage dispensing apparatus and method for active pressure control thereof

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Printing apparatus and method of operation

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Apparatus and method for marking objects on different faces

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Beverage dispensing apparatus and method for active pressure control thereof

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Drink producing apparatus with a dispensing container for liquid, in which a mixing device is disposed, as well as household refrigeration apparatus and method for producing a cooled drink

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Apparatus and method for marking objects on different faces

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Wafer-level manufacture of micro-devices and related two-piece devices, in particular micro-optical systems

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Gas removal apparatus and gas removal method for secondary battery

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Combustion control apparatus and combustion control method for engine

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Hydrogen supply apparatus and hydrogen supply method for measuring fuel consumption of hydrogen fuel vehicle

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Parking assist apparatus and parking assist method for vehicle

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Hybrid sustainable composites and methods of making and using thereof

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Flaw detection apparatus and method for tubes

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Apparatus and method for producing a three-dimensional object built up from at least one material layer

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Apparatus and method for cleaning containers

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Apparatus for removing components from printed circuit boards and a method for removing components in this apparatus

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Method for cleaning an extrusion die

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Method for cleaning an extrusion die

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Chemical-mechanical planarization slurries and powders and methods for using same

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Chemical-mechanical planarization slurries and powders and methods for using same

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Chemical-mechanical planarization slurries and powders and methods for using same

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Method of transferring and bonding an array of micro devices

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Selective release and transfer of micro devices

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Apparatus and method of micro-devices transfer

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Method for improving Uniformity of Chemical-Mechanical Planarization Process

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Amphiphilic abrasive particles and their use for chemical mechanical planarization

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Pad-in-a-bottle and single platen chemical mechanical-planarization for back-end applications

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Bottom Leads Chemical Mechanical Planarization for TMR Magnetic Sensors

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Bottom leads chemical mechanical planarization for tmr magnetic sensors

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Chemical mechanical planarization using amino-polyorganosiloxane-coated abrasives

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Carbon and boron implantation for backside chemical mechanical planarization control

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Tri azole- and/or tri azoli um-based polymers and copolymers as additives for chemical mechanical planarization slurries

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Chemical mechanical planarization polishing for shallow trench isolation

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Pad-ln-a-bottle chemical mechanical planarization polishing with cost-effective non-porous solid polishing pads

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Methods for reducing scratch defects in chemical mechanical planarization

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Tungsten chemical mechanical planarization (CMP) with low dishing and low erosion topography

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Chemical Mechanical Planarization (CMP) For Copper And Through-Silicon Via (TSV)

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Modified water-soluble polysaccharides having different cation types for slurries in chemical mechanical planarization

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Phosphonium based polymers and copolymers as additives for chemical mechanical planarization slurries

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Chemical mechanical planarization (cmp) for copper and through-silicon via (tsv)

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Electrical contact element and method for altering mechanical and/or electrical properties of at least one area of such

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Electrical contact element and method for altering mechanical and/or electrical properties of at least one area of such

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Chemical-mechanical-planarization (cmp) slurry quality control process and particle size distribution measuring systems

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Hinge mechanism, compartment door assembly with such a hinge mechanism, cabinet or refrigerator with such a hinge mechanism and/ or compartment door assembly and recreational vehicle

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Device for converting flow energy transported via a medium into mechanical and/or electrical energy

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Device for converting flow energy transported via a medium into mechanical and/or electrical energy

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Device for converting flow energy transported via a medium into mechanical and/or electrical energy

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Iol injector having a collapsible mechanism and/or a lever-driven rack and pinion

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Electronic apparatus and antenna setting method for electronic apparatus

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Apparatus and an accompanying method for use in a long-haul echo control device for detecting changes in path length and compensating the performance of an echo canceller therein

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Drive control apparatus and drive control method for vibration wave driving apparatus

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Mobile terminal testing apparatus and cell use method for use in the same

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Image acquiring apparatus and image acquiring method for detecting and recognizing size of scan target without using sensors

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Mobile terminal testing apparatus and cell use method for use in the same

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Experimental apparatus and an experimental method for the negative bending moment zone of a continuous beam to bear load under chloride environment

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Optical measurement apparatus and optical measurement method for a liquid or molten material

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Refrigeration cycle apparatus and leakage inspection method for refrigerant piping of refrigeration cycle apparatus

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Logic processing apparatus and logic processing method for composite graphs in fixed layout document

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Apparatus, and an associated method, for compensating for variable delay of packet data in a packet data communication system

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Information processing apparatus and information processing method for accurately estimating a self location

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Knock control apparatus and knock control method for internal combustion engine

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Systems, apparatus, and computer-implemented methods for monitoring packages in transit through a logistics network

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Systems, apparatus, and computer-implemented methods for monitoring packages in transit through a logistics network

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Laser projection apparatus and dispersion correction method for projection image

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Information processing system, information processing apparatus, and information processing method for facilitating job parameter setting

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Misfire detection apparatus and misfire detection method for an internal combustion engine

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Apparatus, and an associated method, for communicating text data in a radio communication system

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Memory apparatus and data rearrangement method for computing in memory

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Apparatus, and an associated method, for forming a traffic route visualization

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Communication system, terminating apparatus, and pon virtualization method for use therein

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Thz measuring apparatus and thz measuring method for detecting impurities in measured objects

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Image processing apparatus and image processing method for identifying a landing location on the moon or planets

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Shared Data Induced Quality Control For A Chemical Mechanical Planarization Process

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Transmission apparatus, reception apparatus, and transmission/reception method for OFDM-based broadcasting system

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Printing system, terminal apparatus and print setting method for setting the print settings by applying specific setting data set

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Data processing apparatus and data processing method for internet of things system

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Display apparatus and signal transmission method for display apparatus

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Image forming apparatus, and memory control method for image forming apparatus

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Clothes treating apparatus and the control method for the same

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Image forming apparatus and gradation correction method for the same

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Memory apparatus and data rearrangement method for computing in memory

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Apparatus, and an associated method, for routing data through logical layers of a communication device

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Apparatus and an associated method, for paging a mobile station operable in a radio communication system

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Apparatus, and an associated method, for performing link layer paging of a mobile station operable in a radio communication system

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Method, apparatus, and parameter training method for friction loss-based differential pressure flow rate measurement

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Image capturing apparatus and image capturing method for generating high-resolution image, and non-transitory computer-readable storage medium storing program

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Apparatus, and an associated method, for providing wlan service in a fixed wireless access communication system

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One-component hardenable substances stable to storage and activatable by mechanical and/or physical forces and method of producing, activating and applying same

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System and methods for percutaneous mechanical and/or neural interface

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Recording medium recording program, information processing apparatus, and information processing method for transcription

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Power feeding apparatus and power feeding method for submerged pump

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Apparatuses and wireless communication methods for data transfer

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Apparatus and the associated methods for calibrating a wavefront sensor

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Power feeding apparatus and power feeding method for submersible pump

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Apparatus, and an associated method, for facilitating synchronization in a wireless mesh network

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Method for producing a semiconductor structure comprising a useful layer made of silicon carbide, with improved electrical properties

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Intermediate structure for transfer, method for preparing micro-device for transfer, and method for processing array of semiconductor device

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Delivery apparatus and methods for implanting prosthetic heart valves

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Wireless communication system and apparatus and method for determining a network transmission mechanism

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Electrical apparatus and methods for an eye

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Apparatus and method for the defense of an animal

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Apparatus and method for processing electronic components

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Fiber laser apparatus, image display apparatus and method of exciting up-conversion fiber laser apparatus

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Storage apparatus and method for accessing a storage apparatus

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Knob element and slide element of an adjusting apparatus and adjusting apparatus and method for adjusting a position of a thermal tripping shaft

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Apparatus and method for deforming a specimen and thereby determine the strain rate

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Apparatus and method for generating at least one random number, use of an optical parametric oscillator

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Computing apparatus and method for providing a user application to be executed in a media playback apparatus

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Apparatus and method for transmitting and receiving signal in multimedia system

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Apparatus and method for transmitting and receiving signal in multimedia system

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Apparatus and method for transmitting and receiving signal in multimedia system

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Apparatus and method for transmitting and receiving signal in multimedia system

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Arrangement in a wave energy recovery apparatus and method for operating a wave energy recovery apparatus

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Micro device, micro device alignment apparatus, and alignment method using same

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Apparatus, system and method for identifying subintimal path of a flexible elongated device

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Apparatus and method for removing a single particulate from a substrate

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Digital video recording apparatus and editing method for recorded broadcast programs

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Apparatus and method for forming and quickly wrapping a bale in a bale forming chamber

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An apparatus and method for electroplating a substrate in a continuous way

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System and method for filling a battery cell with liquid electrolyte

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System and method for filling a battery cell with liquid electrolyte

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System and method for filling a battery cell with liquid electrolyte

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Apparatus and method for performing scalable hierarchical motion estimation

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Meta data information providing server, client apparatus, method of providing meta data information, and method of providing content

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System and method for fastening detection and/or ignition spark plugs and/or inspection window of boilers or the like

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Apparatus and method for measurement of biological structures

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Apparatus and method for measurement of biological structures

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Apparatus and method for measurement of biological structures

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Apparatus and method for measurement of biological structures

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Apparatus and method for measurement of biological structures

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Apparatus and method for selectably operating radio device in alternate operating mode

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Apparatus and method for providing operative power to powerline-network device

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Apparatus and method for providing operative power to powerline-network device

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Wireless power apparatus for substrates treating apparatus and manufacturing method of wireless power apparatus for substrate treating apparatus

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Apparatus and method for selectably operating radio device in alternate operating mode

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Selective transfer of micro devices

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Apparatus and method for securing data in computer storage

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